Inventor
FUJII YOSHINORI
JP31 patents
⚠️ This page may combine multiple inventors who share the name “FUJII YOSHINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULVAC INC
11 patentsUS7821767B2Oct 26, 2010
Electrostatic chuck device
ULVAC INC67 citations98
US11319627B2May 3, 2022
Vacuum processing apparatus
ULVAC INC3 citations73
US11239063B2Feb 1, 2022
Vacuum processing apparatus
ULVAC INC3 citations73
US9960018B2May 1, 2018
RF sputtering apparatus and sputtering method
ULVAC INC3 citations73
US7918640B2Apr 5, 2011
Position correcting apparatus, vacuum processing equipment and position correcting method
ULVAC INC5 citations63
US10435783B2Oct 8, 2019
Target assembly
ULVAC INC1 citations59
US11239064B2Feb 1, 2022
Magnet unit for magnetron sputtering apparatus
ULVAC INC0 citations52
US11230760B2Jan 25, 2022
Sputtering apparatus and method of forming film
ULVAC INC0 citations52
US11923178B2Mar 5, 2024
Vacuum processing apparatus
ULVAC INC0 citations50
US9972479B2May 15, 2018
Target assembly
ULVAC INC1 citations49
US10233536B2Mar 19, 2019
Sputtering apparatus and method of discriminating state thereof
ULVAC INC0 citations42
FUJII YOSHINORI
8 patentsUS8141926B2Mar 27, 2012
Robot hand for substrate transfer
FUJII YOSHINORI15 citations83
US9139381B2Sep 22, 2015
Transport apparatus and vacuum system
FUJII YOSHINORI2 citations62
US8688246B2Apr 1, 2014
Operation monitoring system for processing apparatus
FUJII YOSHINORI3 citations62
US8543235B2Sep 24, 2013
Method of controlling transfer robot
FUJII YOSHINORI2 citations62
US8393662B2Mar 12, 2013
Robot hand for substrate transfer
FUJII YOSHINORI3 citations62
US8688276B2Apr 1, 2014
Teaching method for transfer robot
FUJII YOSHINORI1 citations51
US8390230B2Mar 5, 2013
Method of detecting stop of transport apparatus
FUJII YOSHINORI0 citations51
US9093485B2Jul 28, 2015
Transport method
FUJII YOSHINORI0 citations41
NIPPON ZEON CO
3 patentsUS6281293B1Aug 28, 2001
Mixture composition of synthetic resin and rubber
NIPPON ZEON CO32 citations92
US6489385B1Dec 3, 2002
Highly saturated nitrile copolymer rubber, process for the production thereof, heat-resistant rubber compositions comprising the rubber and composites comprising the rubber and fibers
NIPPON ZEON CO47 citations91
US6410653B1Jun 25, 2002
Highly saturated carboxylated nitrile copolymer rubber and process for the production thereof
NIPPON ZEON CO26 citations91