Inventor
RAUENBUSCH RALPH
DE5 patents
Patents
5 patentsUS10260161B2Apr 16, 2019
Substrate holder reception apparatus
ATOTECH DEUTSCHLAND GMBH8 citations74
US9222192B2Dec 29, 2015
Holding device for a product and treatment method
ATOTECH DEUTSCHLAND GMBH5 citations68
US10407793B2Sep 10, 2019
Substrate holder for vertical galvanic metal deposition
ATOTECH DEUTSCHLAND GMBH3 citations62
US9534310B2Jan 3, 2017
Device for vertical galvanic metal, preferably copper, deposition on a substrate and a container suitable for receiving such a device
ATOTECH DEUTSCHLAND GMBH1 citations48
US10832929B2Nov 10, 2020
Wafer-like substrate processing method and apparatus
ATOTECH DEUTSCHLAND GMBH0 citations33