P

Inventor

LIU WEI

CN1,462 patents
⚠️ This page may combine multiple inventors who share the name “LIU WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

17 patents
US6924191B2Aug 2, 2005

Method for fabricating a gate structure of a field effect transistor

APPLIED MATERIALS INC452 citations99
US6677242B1Jan 13, 2004

Integrated shallow trench isolation approach

APPLIED MATERIALS INC242 citations99
US6235643B1May 22, 2001

Method for etching a trench having rounded top and bottom corners in a silicon substrate

APPLIED MATERIALS INC305 citations98
US7064078B2Jun 20, 2006

Techniques for the use of amorphous carbon (APF) for various etch and litho integration scheme

APPLIED MATERIALS INC114 citations96
US6960416B2Nov 1, 2005

Method and apparatus for controlling etch processes during fabrication of semiconductor devices

APPLIED MATERIALS INC65 citations95
US6380095B1Apr 30, 2002

Silicon trench etch using silicon-containing precursors to reduce or avoid mask erosion

APPLIED MATERIALS INC66 citations95
US6180533B1Jan 30, 2001

Method for etching a trench having rounded top corners in a silicon substrate

APPLIED MATERIALS INC71 citations94
US6911399B2Jun 28, 2005

Method of controlling critical dimension microloading of photoresist trimming process by selective sidewall polymer deposition

APPLIED MATERIALS INC29 citations93
US6458671B1Oct 1, 2002

Method of providing a shallow trench in a deep-trench device

APPLIED MATERIALS INC26 citations93
USD1034491SJul 9, 2024

Edge ring

APPLIED MATERIALS INC17 citations92
US7718081B2May 18, 2010

Techniques for the use of amorphous carbon (APF) for various etch and litho integration schemes

APPLIED MATERIALS INC17 citations92
US7498106B2Mar 3, 2009

Method and apparatus for controlling etch processes during fabrication of semiconductor devices

APPLIED MATERIALS INC18 citations92
US7094613B2Aug 22, 2006

Method for controlling accuracy and repeatability of an etch process

APPLIED MATERIALS INC36 citations92
US6924088B2Aug 2, 2005

Method and system for realtime CD microloading control

APPLIED MATERIALS INC19 citations92
US6589879B2Jul 8, 2003

Nitride open etch process based on trifluoromethane and sulfur hexafluoride

APPLIED MATERIALS INC23 citations92
US6566270B1May 20, 2003

Integration of silicon etch and chamber cleaning processes

APPLIED MATERIALS INC31 citations92
US6491835B1Dec 10, 2002

Metal mask etching of silicon

APPLIED MATERIALS INC39 citations92

LIU WEI

4 patents

SILICON GENESIS CORP

3 patents

EVIDENT TECHNOLOGIES

2 patents

MASSACHUSETTS INST TECHNOLOGY

2 patents

SEARS BRANDS LLC

2 patents

DELL PRODUCTS LP

2 patents

CORNING INC

2 patents

(unassigned)

2 patents

UBER TECHNOLOGIES INC

1 patent

EVIDENT TECHNOLOGIES INC

1 patent

NURO INC

1 patent

PLURATA TECHNOLOGIES INC

1 patent

RENEURON INC

1 patent

PLURATA TECHNOLOGIES LLC

1 patent

INFABRIC TECHNOLOGIES INC

1 patent

SHAFIEE MOHAMMAD REZA

1 patent

WYETH CORP

1 patent

LIANG HAIFAN

1 patent

AZURE DYNAMICS INC

1 patent

FIH HONG KONG LTD

1 patent

GENENCOR INT

1 patent

US ARMY

1 patent

Showing the top 50 of 1,462 patents by PatentIndex Score.