Inventor
CHANG SCOTT
TW6 patents
⚠️ This page may combine multiple inventors who share the name “CHANG SCOTT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC
3 patentsUS9737971B2Aug 22, 2017
Chemical mechanical polishing pad, polishing layer analyzer and method
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC4 citations66
US10272541B2Apr 30, 2019
Polishing layer analyzer and method
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations35
US9770808B2Sep 26, 2017
Method of manufacturing chemical mechanical polishing pads
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations35