Inventor
TATE JAMES DAVID
US3 patents
Patents
3 patentsUS9737971B2Aug 22, 2017
Chemical mechanical polishing pad, polishing layer analyzer and method
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC4 citations66
US10272541B2Apr 30, 2019
Polishing layer analyzer and method
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations35
US9770808B2Sep 26, 2017
Method of manufacturing chemical mechanical polishing pads
ROHM & HAAS ELECT MATERIALS CMP HOLDINGS INC0 citations35