Inventor
KOOSAU DENIS M
US16 patents
⚠️ This page may combine multiple inventors who share the name “KOOSAU DENIS M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
14 patentsUS9947517B1Apr 17, 2018
Adjustable extended electrode for edge uniformity control
APPLIED MATERIALS INC48 citations98
US10504702B2Dec 10, 2019
Adjustable extended electrode for edge uniformity control
APPLIED MATERIALS INC14 citations94
US10103010B2Oct 16, 2018
Adjustable extended electrode for edge uniformity control
APPLIED MATERIALS INC34 citations94
US7436645B2Oct 14, 2008
Method and apparatus for controlling temperature of a substrate
APPLIED MATERIALS INC37 citations91
US10991556B2Apr 27, 2021
Adjustable extended electrode for edge uniformity control
APPLIED MATERIALS INC11 citations86
US10553404B2Feb 4, 2020
Adjustable extended electrode for edge uniformity control
APPLIED MATERIALS INC13 citations86
US11393710B2Jul 19, 2022
Wafer edge ring lifting solution
APPLIED MATERIALS INC9 citations85
US12009236B2Jun 11, 2024
Sensors and system for in-situ edge ring erosion monitor
APPLIED MATERIALS INC3 citations73
US11043400B2Jun 22, 2021
Movable and removable process kit
APPLIED MATERIALS INC3 citations73
US12094752B2Sep 17, 2024
Wafer edge ring lifting solution
APPLIED MATERIALS INC1 citations62
US10586718B2Mar 10, 2020
Cooling base with spiral channels for ESC
APPLIED MATERIALS INC1 citations62
US11668553B2Jun 6, 2023
Apparatus and method for controlling edge ring variation
APPLIED MATERIALS INC0 citations61
US11935773B2Mar 19, 2024
Calibration jig and calibration method
APPLIED MATERIALS INC0 citations60
US9050699B2Jun 9, 2015
Polishing head zone boundary smoothing
APPLIED MATERIALS INC0 citations52