Inventor
ANGLIN KEVIN R
US6 patents
⚠️ This page may combine multiple inventors who share the name “ANGLIN KEVIN R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS11646213B2May 9, 2023
Multi-zone platen temperature control
APPLIED MATERIALS INC1 citations59
US11664193B2May 30, 2023
Temperature controlled/electrically biased wafer surround
APPLIED MATERIALS INC0 citations56
US12106943B2Oct 1, 2024
Substrate halo arrangement for improved process uniformity
APPLIED MATERIALS INC0 citations50
US10665421B2May 26, 2020
In-situ beam profile metrology
APPLIED MATERIALS INC0 citations50
US12191117B2Jan 7, 2025
Compact low angle ion beam extraction assembly and processing apparatus
APPLIED MATERIALS INC0 citations46