Inventor
MARAKHATANOV ALEXEI
US5 patents
⚠️ This page may combine multiple inventors who share the name “MARAKHATANOV ALEXEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS10720314B2Jul 21, 2020
Confinement ring for use in a plasma processing system
LAM RES CORP5 citations83
US11342166B2May 24, 2022
Confinement ring for use in a plasma processing system
LAM RES CORP2 citations72
US11791140B2Oct 17, 2023
Confinement ring for use in a plasma processing system
LAM RES CORP0 citations61