Inventor
KUO MING-SUNG
TW4 patents
Patents
4 patentsUS12057353B2Aug 6, 2024
Measurement pattern and method for measuring overlay shift of bonded wafers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations67
US11195737B2Dec 7, 2021
Apparatus for storing and transporting semiconductor elements, and method of making the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US12406890B2Sep 2, 2025
Method for measuring overlay shift of bonded wafers
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations56
US9423359B2Aug 23, 2016
Wafer charging electromagnetic inspection tool and method of using
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations40