Inventor
KAI TOSHIYUKI
JP15 patents
⚠️ This page may combine multiple inventors who share the name “KAI TOSHIYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
JSR CORP
7 patentsUS6468714B2Oct 22, 2002
Negative radiation-sensitive resin composition
JSR CORP14 citations82
US8377627B2Feb 19, 2013
Compound and radiation-sensitive composition
JSR CORP2 citations62
US6403288B1Jun 11, 2002
Resist pattern formation method
JSR CORP5 citations62
US8361691B2Jan 29, 2013
Radiation-sensitive composition and process for producing low-molecular compound for use therein
JSR CORP2 citations61
US8809476B2Aug 19, 2014
Polymer
JSR CORP0 citations51
US8771923B2Jul 8, 2014
Radiation-sensitive composition
JSR CORP0 citations51
US7323284B2Jan 29, 2008
Negative type radiation sensitive resin composition
JSR CORP0 citations37