Inventor
BOUDOUR ABDU
US6 patents
Patents
6 patentsUS5625193AApr 29, 1997
Optical inspection system and method for detecting flaws on a diffractive surface
QC OPTICS INC63 citations95
US6603542B1Aug 5, 2003
High sensitivity optical inspection system and method for detecting flaws on a diffractive surface
QC OPTICS INC64 citations92
US5814829ASep 29, 1998
Multistation surface inspection system
QC OPTICS INC23 citations92
US5717198AFeb 10, 1998
Pellicle reflectivity monitoring system having means for compensating for portions of light reflected by the pellicle
QC OPTICS INC34 citations92
US5602401AFeb 11, 1997
Data processing system and method for a surface inspection apparatus
QC OPTICS INC11 citations73
US5675409AOct 7, 1997
Plate holder for a surface inspection system
QC OPTICS INC0 citations51