Inventor

SMITH JR WILLIAM CHARLES

US3 patents

Patents

3 patents

US5666985ASep 16, 1997

Programmable apparatus for cleaning semiconductor elements

IBM82 citations92

US5863348AJan 26, 1999

Programmable method for cleaning semiconductor elements

IBM28 citations89

US5715610AFeb 10, 1998

Programmable method and apparatus for cleaning semiconductor elements

IBM18 citations89