Inventor
GARVIN JR JAMES F
US3 patents
Patents
3 patentsUS5998296ADec 7, 1999
Method of forming contacts and vias in semiconductor
TEXAS INSTRUMENTS INC28 citations90
US6572461B2Jun 3, 2003
Method for producing wafer notches with rounded corners and a tool therefor
TEXAS INSTRUMENTS INC2 citations57
US6448154B1Sep 10, 2002
Method for producing wafers with rounded corners in the notches used for alignment in the fabrication of semiconductor devices
TEXAS INSTRUMENTS INC4 citations57