Inventor
CHEN KUANG-JUNG J
US4 patents
⚠️ This page may combine multiple inventors who share the name “CHEN KUANG-JUNG J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsUS7563563B2Jul 21, 2009
Wet developable bottom antireflective coating composition and method for use thereof
IBM8 citations82
US7217496B2May 15, 2007
Fluorinated photoresist materials with improved etch resistant properties
IBM15 citations82
US7407736B2Aug 5, 2008
Methods of improving single layer resist patterning scheme
IBM0 citations37