Inventor
KHOJASTEH MAHMOUD
US34 patents
⚠️ This page may combine multiple inventors who share the name “KHOJASTEH MAHMOUD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
25 patentsUS7141692B2Nov 28, 2006
Molecular photoresists containing nonpolymeric silsesquioxanes
IBM19 citations93
US10388727B2Aug 20, 2019
Stacked indium gallium arsenide nanosheets on silicon with bottom trapezoid isolation
IBM7 citations84
US8367556B1Feb 5, 2013
Use of an organic planarizing mask for cutting a plurality of gate lines
IBM10 citations83
US8647445B1Feb 11, 2014
Process for cleaning semiconductor devices and/or tooling during manufacturing thereof
IBM12 citations82
US8367555B2Feb 5, 2013
Removal of masking material
IBM15 citations82
US8017303B2Sep 13, 2011
Ultra low post exposure bake photoresist materials
IBM7 citations82
US7563563B2Jul 21, 2009
Wet developable bottom antireflective coating composition and method for use thereof
IBM8 citations82
US7217496B2May 15, 2007
Fluorinated photoresist materials with improved etch resistant properties
IBM15 citations82
US10748990B2Aug 18, 2020
Stacked indium gallium arsenide nanosheets on silicon with bottom trapezoid isolation
IBM2 citations73
US10615271B2Apr 7, 2020
III-V lateral bipolar junction transistor on local facetted buried oxide layer
IBM1 citations73
US10276384B2Apr 30, 2019
Plasma shallow doping and wet removal of depth control cap
IBM2 citations73
US9881793B2Jan 30, 2018
Neutral hard mask and its application to graphoepitaxy-based directed self-assembly (DSA) patterning
IBM2 citations72
US4849501AJul 18, 1989
Polyimide coating compositions based on meta-dialkyldihydrogen pyromellitate and aromatic diamines
IBM6 citations69
US11444185B2Sep 13, 2022
III-V lateral bipolar junction transistor on local facetted buried oxide layer
IBM0 citations63
US11437502B2Sep 6, 2022
III-V lateral bipolar junction transistor on local facetted buried oxide layer
IBM0 citations63
US7439302B2Oct 21, 2008
Low refractive index polymers as underlayers for silicon-containing photoresists
IBM3 citations63
US7326523B2Feb 5, 2008
Low refractive index polymers as underlayers for silicon-containing photoresists
IBM3 citations63
US7183036B2Feb 27, 2007
Low activation energy positive resist
IBM6 citations63
US7129016B2Oct 31, 2006
Positive resist containing naphthol functionality
IBM4 citations63
US9058976B2Jun 16, 2015
Cleaning composition and process for cleaning semiconductor devices and/or tooling during manufacturing thereof
IBM2 citations60
US8920567B2Dec 30, 2014
Post metal chemical-mechanical planarization cleaning process
IBM3 citations55
US10546928B2Jan 28, 2020
Forming stacked twin III-V nano-sheets using aspect-ratio trapping techniques
IBM0 citations52
US10167443B2Jan 1, 2019
Wet clean process for removing CxHyFz etch residue
IBM0 citations51
US9536731B2Jan 3, 2017
Wet clean process for removing CxHyFz etch residue
IBM0 citations51
US7608390B2Oct 27, 2009
Top antireflective coating composition containing hydrophobic and acidic groups
IBM0 citations51
AFZALI-ARDAKANI ALI
5 patentsUS8618036B2Dec 31, 2013
Aqueous cerium-containing solution having an extended bath lifetime for removing mask material
AFZALI-ARDAKANI ALI11 citations83
US8563408B2Oct 22, 2013
Spin-on formulation and method for stripping an ion implanted photoresist
AFZALI-ARDAKANI ALI2 citations62
US8252673B2Aug 28, 2012
Spin-on formulation and method for stripping an ion implanted photoresist
AFZALI-ARDAKANI ALI3 citations62
US8445316B2May 21, 2013
Non-lithographic method of patterning contacts for a photovoltaic device
AFZALI-ARDAKANI ALI0 citations52
US8455420B2Jun 4, 2013
Spin-on formulation and method for stripping an ion implanted photoresist
AFZALI-ARDAKANI ALI0 citations51