Inventor
KWONG RANEE WAI-LING
US13 patents
⚠️ This page may combine multiple inventors who share the name “KWONG RANEE WAI-LING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
6 patentsUS6543617B2Apr 8, 2003
Packaged radiation sensitive coated workpiece process for making and method of storing same
IBM16 citations90
US7563563B2Jul 21, 2009
Wet developable bottom antireflective coating composition and method for use thereof
IBM8 citations82
US8053172B2Nov 8, 2011
Photoresists and methods for optical proximity correction
IBM2 citations61
US7168224B2Jan 30, 2007
Method of making a packaged radiation sensitive resist film-coated workpiece
IBM4 citations60
US8021828B2Sep 20, 2011
Photoresist compositions and methods related to near field masks
IBM1 citations52
US6153696ANov 28, 2000
Process for forming carbonates of hydroxyaromatic compounds
IBM0 citations35