Inventor
PATEL KAUSHAL S
US7 patents
⚠️ This page may combine multiple inventors who share the name “PATEL KAUSHAL S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS6892781B2May 17, 2005
Method and apparatus for application of pressure to a workpiece by thermal expansion
IBM38 citations89
US7563563B2Jul 21, 2009
Wet developable bottom antireflective coating composition and method for use thereof
IBM8 citations82
US7217496B2May 15, 2007
Fluorinated photoresist materials with improved etch resistant properties
IBM15 citations82
US7544750B2Jun 9, 2009
Top antireflective coating composition with low refractive index at 193nm radiation wavelength
IBM3 citations61
US7608390B2Oct 27, 2009
Top antireflective coating composition containing hydrophobic and acidic groups
IBM0 citations51