Inventor
GOOD MARK A
US3 patents
Patents
3 patentsUS6709990B2Mar 23, 2004
Method for fabrication of a high capacitance interpoly dielectric
ATMEL CORP2 citations58
US6495475B2Dec 17, 2002
Method for fabrication of a high capacitance interpoly dielectric
ATMEL CORP1 citations48
US7629649B2Dec 8, 2009
Method and materials to control doping profile in integrated circuit substrate material
ATMEL CORP1 citations43