P

Inventor

CHEONG WOO SEOCK

KR11 patents
⚠️ This page may combine multiple inventors who share the name “CHEONG WOO SEOCK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HYNIX SEMICONDUCTOR INC

9 patents
US6844259B2Jan 18, 2005

Method for forming contact plug in semiconductor device

HYNIX SEMICONDUCTOR INC77 citations96
US6818537B2Nov 16, 2004

Method of manufacturing a contact plug for a semiconductor device

HYNIX SEMICONDUCTOR INC20 citations91
US6624065B2Sep 23, 2003

Method of fabricating a semiconductor device using a damascene metal gate

HYNIX SEMICONDUCTOR INC16 citations83
US6605520B2Aug 12, 2003

Method of forming silicon-germanium film

HYNIX SEMICONDUCTOR INC18 citations83
US6923869B2Aug 2, 2005

Device for deposition with chamber cleaner and method for cleaning the chamber

HYNIX SEMICONDUCTOR INC5 citations72
US7497221B2Mar 3, 2009

Method for cleaning deposition chamber

HYNIX SEMICONDUCTOR INC1 citations61
US6933228B2Aug 23, 2005

Method of manufacturing of contact plug in a contact hole on a silicon substrate

HYNIX SEMICONDUCTOR INC5 citations61
US7361229B2Apr 22, 2008

Device for deposition with chamber cleaner and method for cleaning chamber

HYNIX SEMICONDUCTOR INC0 citations51
US6712903B2Mar 30, 2004

Mask for evaluating selective epitaxial growth process

HYNIX SEMICONDUCTOR INC0 citations51

HYUNDAI ELECTRONICS IND

2 patents
US6521508B1Feb 18, 2003

Method of manufacturing a contact plug in a semiconductor device using selective epitaxial growth of silicon process

HYUNDAI ELECTRONICS IND100 citations92
US6478873B1Nov 12, 2002

Method of optimizing process of selective epitaxial growth

HYUNDAI ELECTRONICS IND7 citations73