Inventor
MORI HIDEHIKO
JP10 patents
Patents
10 patentsUS6584367B1Jun 24, 2003
Stage position control method and stage position control apparatus capable of improving positioning precision
SUMITOMO HEAVY INDUSTRIES36 citations92
US6564110B1May 13, 2003
Position controlling apparatus capable of reducing the effect of disturbance
SUMITOMO HEAVY INDUSTRIES36 citations92
US7082674B2Aug 1, 2006
Method for winding a single coil of a coil unit for a linear motor
SUMITOMO HEAVY INDUSTRIES11 citations82
US6806594B2Oct 19, 2004
Coil unit for linear motor
SUMITOMO HEAVY INDUSTRIES17 citations81
US6925355B2Aug 2, 2005
Substrate transfer device
SUMITOMO HEAVY INDUSTRIES8 citations71
US6661128B2Dec 9, 2003
Two-phase excitation linear motor
SUMITOMO HEAVY INDUSTRIES7 citations71
US6644584B2Nov 11, 2003
Single coil of coil unit for linear motor, method and device for winding and forming the same, and method for forming and fabricating coil unit
SUMITOMO HEAVY INDUSTRIES4 citations61
US7239939B2Jul 3, 2007
Substrate transfer device
SUMITOMO HEAVY INDUSTRIES3 citations60
US6646536B2Nov 11, 2003
Single coil of coil unit for linear motor and winding former thereof
SUMITOMO HEAVY INDUSTRIES2 citations60
US7387530B2Jun 17, 2008
Waterproof terminal block unit with insulating plate
SUMITOMO HEAVY INDUSTRIES4 citations56