Inventor
TRUMAN J KELLY
US12 patents
Patents
12 patentsUS7159599B2Jan 9, 2007
Method and apparatus for processing a wafer
APPLIED MATERIALS INC96 citations97
US6927176B2Aug 9, 2005
Cleaning method and solution for cleaning a wafer in a single wafer process
APPLIED MATERIALS INC67 citations97
US7585686B2Sep 8, 2009
Method and apparatus for processing a wafer
APPLIED MATERIALS INC33 citations92
US7037842B2May 2, 2006
Method and apparatus for dissolving a gas into a liquid for single wet wafer processing
APPLIED MATERIALS INC43 citations92
US7021319B2Apr 4, 2006
Assisted rinsing in a single wafer cleaning process
APPLIED MATERIALS INC23 citations92
US7334588B2Feb 26, 2008
Method and apparatus for wafer cleaning
APPLIED MATERIALS INC26 citations91
US7449127B2Nov 11, 2008
Cleaning method and solution for cleaning a wafer in a single wafer process
APPLIED MATERIALS INC10 citations84
US6524940B2Feb 25, 2003
Methods and devices utilizing the ammonium termination of silicon dioxide films
APPLIED MATERIALS INC17 citations84
US7451774B2Nov 18, 2008
Method and apparatus for wafer cleaning
APPLIED MATERIALS INC11 citations82
US7819985B2Oct 26, 2010
Method and apparatus for wafer cleaning
APPLIED MATERIALS INC6 citations72
US7836901B2Nov 23, 2010
Method and apparatus for wafer cleaning
APPLIED MATERIALS INC3 citations61
US7205023B2Apr 17, 2007
Method and apparatus for chemical mixing in a single wafer process
APPLIED MATERIALS INC2 citations61