Inventor
KAJI NARUHIKO
JP12 patents
⚠️ This page may combine multiple inventors who share the name “KAJI NARUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
7 patentsUS6164295ADec 26, 2000
CVD apparatus with high throughput and cleaning method therefor
TOSHIBA KK79 citations96
US6798038B2Sep 28, 2004
Manufacturing method of semiconductor device with filling insulating film into trench
TOSHIBA KK43 citations92
US6153509ANov 28, 2000
Method of manufacturing a semiconductor device
TOSHIBA KK22 citations92
US6938638B2Sep 6, 2005
Gas circulating-processing apparatus
TOSHIBA KK13 citations84
US7371654B2May 13, 2008
Manufacturing method of semiconductor device with filling insulating film into trench
TOSHIBA KK8 citations73
US6368977B1Apr 9, 2002
Semiconductor device manufacturing method
TOSHIBA KK3 citations60
US7084077B2Aug 1, 2006
Method of fabricating multilayer interconnect wiring structure having low dielectric constant insulator film with enhanced adhesivity
TOSHIBA KK1 citations48