Inventor
TAKAMI SHO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “TAKAMI SHO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
8 patentsUS7187345B2Mar 6, 2007
Image forming method and charged particle beam apparatus
HITACHI HIGH TECH CORP14 citations92
US7817105B2Oct 19, 2010
Image forming method and charged particle beam apparatus
HITACHI HIGH TECH CORP9 citations83
US7030376B2Apr 18, 2006
Electron beam apparatus and method for production of its specimen chamber
HITACHI HIGH TECH CORP6 citations72
US7795581B2Sep 14, 2010
Pattern measuring method and electron microscope
HITACHI HIGH TECH CORP2 citations62
US7435958B2Oct 14, 2008
Electron beam apparatus and method for production of its specimen chamber
HITACHI HIGH TECH CORP3 citations61
US7091496B2Aug 15, 2006
Electron microscopic inspection apparatus
HITACHI HIGH TECH CORP4 citations57
US7566892B2Jul 28, 2009
Electron beam apparatus and method for production of its specimen chamber
HITACHI HIGH TECH CORP0 citations50
US7205550B2Apr 17, 2007
Electron beam apparatus and method for production of its specimen chamber
HITACHI HIGH TECH CORP0 citations50