Inventor
OTAKA TADASHI
JP55 patents
⚠️ This page may combine multiple inventors who share the name “OTAKA TADASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
36 patentsUS5412210AMay 2, 1995
Scanning electron microscope and method for production of semiconductor device by using the same
HITACHI LTD148 citations99
US6114695ASep 5, 2000
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD62 citations96
US5969357AOct 19, 1999
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD43 citations96
US5866904AFeb 2, 1999
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD42 citations96
US5598002AJan 28, 1997
Electron beam apparatus
HITACHI LTD68 citations96
US5594245AJan 14, 1997
Scanning electron microscope and method for dimension measuring by using the same
HITACHI LTD71 citations96
US5389787AFeb 14, 1995
Scanning electron microscope
HITACHI LTD65 citations96
US5324950AJun 28, 1994
Charged particle beam apparatus
HITACHI LTD59 citations96
US5442183AAug 15, 1995
Charged particle beam apparatus including means for maintaining a vacuum seal
HITACHI LTD47 citations95
US5412209AMay 2, 1995
Electron beam apparatus
HITACHI LTD105 citations95
US7236651B2Jun 26, 2007
Image evaluation method and microscope
HITACHI LTD16 citations93
US7095884B2Aug 22, 2006
Method and apparatus for circuit pattern inspection
HITACHI LTD22 citations93
US6864493B2Mar 8, 2005
Charged particle beam alignment method and charged particle beam apparatus
HITACHI LTD36 citations93
US5387793AFeb 7, 1995
Scanning electron microscope
HITACHI LTD31 citations93
US5276325AJan 4, 1994
Scanning microscope and a method of operating such a scanning microscope
HITACHI LTD40 citations93
USD332616SJan 19, 1993
Electronic microscope
HITACHI LTD23 citations93
US5149967ASep 22, 1992
Charged-particle beam apparatus
HITACHI LTD26 citations93
US6140644AOct 31, 2000
Inspection apparatus and method using a particle beam
HITACHI LTD28 citations92
US5614713AMar 25, 1997
Scanning electron microscope
HITACHI LTD26 citations92
US5254856AOct 19, 1993
Charged particle beam apparatus having particular electrostatic objective lens and vacuum pump systems
HITACHI LTD43 citations92
US7659508B2Feb 9, 2010
Method for measuring dimensions of sample and scanning electron microscope
HITACHI LTD11 citations84
US7605381B2Oct 20, 2009
Charged particle beam alignment method and charged particle beam apparatus
HITACHI LTD9 citations84
US7369703B2May 6, 2008
Method and apparatus for circuit pattern inspection
HITACHI LTD10 citations84
US6667483B2Dec 23, 2003
Apparatus using charged particle beam
HITACHI LTD13 citations84
US7340111B2Mar 4, 2008
Image evaluation method and microscope
HITACHI LTD6 citations74
US6653634B1Nov 25, 2003
Method of measuring length with scanning type electron microscope
HITACHI LTD12 citations74
US6274876B1Aug 14, 2001
Inspection apparatus and method using particle beam and the particle-beam-applied apparatus
HITACHI LTD14 citations74
US5026995AJun 25, 1991
Particle beam surface analyzer
HITACHI LTD19 citations74
US5912462AJun 15, 1999
Electron microscope
HITACHI LTD10 citations73
US4889995ADec 26, 1989
Apparatus for analysis employing electron
HITACHI LTD16 citations72
US7805023B2Sep 28, 2010
Image evaluation method and microscope
HITACHI LTD3 citations63
US5463221AOct 31, 1995
Electron beam measuring apparatus
HITACHI LTD6 citations63
US5013914AMay 7, 1991
Method and apparatus for generating electron channeling patterns
HITACHI LTD2 citations63
US4916315AApr 10, 1990
Scanning electron microscope for observing and measuring minute pattern of sample
HITACHI LTD6 citations63
US4803369AFeb 7, 1989
Purification device for charged particle beam diaphragm
HITACHI LTD3 citations63
US6933500B2Aug 23, 2005
Electron microscope
HITACHI LTD3 citations62
HITACHI HIGH TECH CORP
13 patentsUS7022983B2Apr 4, 2006
Monochromator and scanning electron microscope using the same
HITACHI HIGH TECH CORP15 citations93
US6791084B2Sep 14, 2004
Method and scanning electron microscope for measuring dimension of material on sample
HITACHI HIGH TECH CORP51 citations93
US7034296B2Apr 25, 2006
Method of forming a sample image and charged particle beam apparatus
HITACHI HIGH TECH CORP24 citations92
US7285777B2Oct 23, 2007
Sample dimension measuring method and scanning electron microscope
HITACHI HIGH TECH CORP13 citations84
US7476856B2Jan 13, 2009
Sample dimension-measuring method and charged particle beam apparatus
HITACHI HIGH TECH CORP10 citations83
US7315024B2Jan 1, 2008
Monochromator and scanning electron microscope using the same
HITACHI HIGH TECH CORP5 citations74
US7910886B2Mar 22, 2011
Sample dimension measuring method and scanning electron microscope
HITACHI HIGH TECH CORP6 citations63
US7838827B2Nov 23, 2010
Monochromator and scanning electron microscope using the same
HITACHI HIGH TECH CORP4 citations63
US7800059B2Sep 21, 2010
Method of forming a sample image and charged particle beam apparatus
HITACHI HIGH TECH CORP3 citations62
US7361894B2Apr 22, 2008
Method of forming a sample image and charged particle beam apparatus
HITACHI HIGH TECH CORP6 citations62
US7164126B2Jan 16, 2007
Method of forming a sample image and charged particle beam apparatus
HITACHI HIGH TECH CORP5 citations62
US7038767B2May 2, 2006
Three-dimensional micropattern profile measuring system and method
HITACHI HIGH TECH CORP3 citations62
US6894790B2May 17, 2005
Micropattern shape measuring system and method
HITACHI HIGH TECH CORP2 citations61
OTAKA TADASHI
1 patentShowing the top 50 of 55 patents by PatentIndex Score.