Inventor

SCHWECKENDIEK JUERGEN

DE4 patents

⚠️ This page may combine multiple inventors who share the name “SCHWECKENDIEK JUERGEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED SCIENCE & TECH INC

1 patent

US6786976B1Sep 7, 2004

Method and system for cleaning semiconductor elements

APPLIED SCIENCE & TECH INC29 citations90

SORBIOS GMBH

1 patent

US5364600ANov 15, 1994

Apparatus for producing ozone from oxygen

SORBIOS GMBH42 citations84

RENA SONDERMASCHINEN GMBH

1 patent

US7270240B2Sep 18, 2007

Device for accomodating substrates

RENA SONDERMASCHINEN GMBH9 citations66

MKS INSTR INC

1 patent

US7067017B2Jun 27, 2006

Method and system for cleaning semiconductor elements

MKS INSTR INC1 citations49