Inventor
KLEE VEIT
US6 patents
Patents
6 patentsUS7985676B2Jul 26, 2011
Method of making a contact in a semiconductor device
INFINEON TECHNOLOGIES AG10 citations83
US7235472B2Jun 26, 2007
Method of making fully silicided gate electrode
INFINEON TECHNOLOGIES AG10 citations82
US6605396B2Aug 12, 2003
Resolution enhancement for alternating phase shift masks
INFINEON TECHNOLOGIES AG9 citations72
US6551874B2Apr 22, 2003
Self-aligned STI process using nitride hard mask
INFINEON TECHNOLOGIES AG12 citations71
US7678704B2Mar 16, 2010
Method of making a contact in a semiconductor device
INFINEON TECHNOLOGIES AG5 citations61
US6566227B2May 20, 2003
Strap resistance using selective oxidation to cap DT poly before STI etch
INFINEON TECHNOLOGIES AG6 citations59