Inventor
BEDGE SATISH
US11 patents
Patents
11 patentsUS6200909B1Mar 13, 2001
Method for selective etching of antireflective coatings
MICRON TECHNOLOGY INC18 citations91
US6103637AAug 15, 2000
Method for selective etching of antireflective coatings
MICRON TECHNOLOGY INC21 citations91
US5981401ANov 9, 1999
Method for selective etching of anitreflective coatings
MICRON TECHNOLOGY INC27 citations91
US6740593B2May 25, 2004
Semiconductor processing methods utilizing low concentrations of reactive etching components
MICRON TECHNOLOGY INC9 citations73
US6734089B1May 11, 2004
Techniques for improving wordline fabrication of a memory device
MICRON TECHNOLOGY INC9 citations73
US6709983B2Mar 23, 2004
Semiconductor processing methods utilizing low concentrations of reactive etching components
MICRON TECHNOLOGY INC9 citations73
US6576557B1Jun 10, 2003
Semiconductor processing methods
MICRON TECHNOLOGY INC6 citations73
US6531071B1Mar 11, 2003
Passivation for cleaning a material
MICRON TECHNOLOGY INC8 citations72
US7544622B2Jun 9, 2009
Passivation for cleaning a material
MICRON TECHNOLOGY INC4 citations61
US7622049B2Nov 24, 2009
Passivation for cleaning a material
MICRON TECHNOLOGY INC0 citations51
US7699998B2Apr 20, 2010
Method of substantially uniformly etching non-homogeneous substrates
MICRON TECHNOLOGY INC0 citations46