Inventor
KNUTSON KARSON
US3 patents
Patents
3 patentsUS7758238B2Jul 20, 2010
Temperature measurement with reduced extraneous infrared in a processing chamber
INTEL CORP8 citations80
US7892971B2Feb 22, 2011
Sub-second annealing processes for semiconductor devices
INTEL CORP5 citations59
US7767509B2Aug 3, 2010
Methods of forming a multilayer capping film to minimize differential heating in anneal processes
INTEL CORP2 citations51