P

Inventor

OOSHIMA KAZUHIKO

JP4 patents
⚠️ This page may combine multiple inventors who share the name “OOSHIMA KAZUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents
US7802986B2Sep 28, 2010

Thermal processing apparatus

TOKYO ELECTRON LTD5 citations59
US12560383B2Feb 24, 2026

Heat treatment apparatus and heat treatment method

TOKYO ELECTRON LTD0 citations45
US7384595B2Jun 10, 2008

Heat-treating apparatus and heat-treating method

TOKYO ELECTRON LTD0 citations38

MIZUNAGA KOUICHI

1 patent
US8858710B2Oct 14, 2014

Chemical solution vaporizing tank and chemical solution treating system

MIZUNAGA KOUICHI3 citations54