Inventor

GRUENHAGEN MICHAEL

US5 patents

⚠️ This page may combine multiple inventors who share the name “GRUENHAGEN MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GRUENHAGEN MICHAEL

2 patents

US8722528B2May 13, 2014

Die backside standoff structures for semiconductor devices

GRUENHAGEN MICHAEL6 citations75

US8314473B2Nov 20, 2012

Die backside standoff structures for semiconductor devices

GRUENHAGEN MICHAEL0 citations43

TEL FSI INC

1 patent

US9564378B2Feb 7, 2017

Detection of lost wafer from spinning chuck

TEL FSI INC7 citations81

TEL MFG AND ENGINEERING OF AMERICA INC

1 patent

US12334348B2Jun 17, 2025

Substrate scanning apparatus with pendulum and rotatable substrate holder

TEL MFG AND ENGINEERING OF AMERICA INC0 citations47

KIM SUKU

1 patent

US8624393B2Jan 7, 2014

Methods and designs for localized wafer thinning

KIM SUKU0 citations45