Inventor
HOSHINO HIDEO
JP40 patents
⚠️ This page may combine multiple inventors who share the name “HOSHINO HIDEO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
17 patentsUS6987279B2Jan 17, 2006
Light source device and exposure equipment using the same
GIGAPHOTON INC67 citations98
US7271401B2Sep 18, 2007
Extreme ultra violet light source device
GIGAPHOTON INC60 citations97
US7297968B2Nov 20, 2007
Debris collector for EUV light generator
GIGAPHOTON INC31 citations93
US8003962B2Aug 23, 2011
Extreme ultraviolet light source apparatus and nozzle protection device
GIGAPHOTON INC13 citations84
US12109648B2Oct 8, 2024
Laser annealing apparatus and method for manufacturing electronic device
GIGAPHOTON INC2 citations73
US10122145B2Nov 6, 2018
Laser apparatus and extreme ultraviolet light generation system
GIGAPHOTON INC2 citations73
US8742380B2Jun 3, 2014
Target supply device, extreme ultraviolet light generation apparatus, and method for supplying target
GIGAPHOTON INC5 citations73
US8698114B2Apr 15, 2014
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source, and method of adjusting laser light source device for extreme ultraviolet light source device
GIGAPHOTON INC4 citations73
US10141186B2Nov 27, 2018
Target image-capture device, extreme-ultraviolet-light generation device, and extreme-ultraviolet-light generation system
GIGAPHOTON INC2 citations72
US8934510B2Jan 13, 2015
Wavelength converter, wavelength converting device, solid state laser device, and laser system
GIGAPHOTON INC3 citations62
US9362703B2Jun 7, 2016
Optical device, laser apparatus, and extreme ultraviolet light generation system
GIGAPHOTON INC0 citations52
US8811438B2Aug 19, 2014
Temperature controller for gas laser
GIGAPHOTON INC0 citations52
US8804902B2Aug 12, 2014
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus
GIGAPHOTON INC0 citations52
US8787413B2Jul 22, 2014
Temperature controller for gas laser
GIGAPHOTON INC0 citations52
US9685756B2Jun 20, 2017
Laser amplifier, laser apparatus, and extreme ultraviolet light generating system
GIGAPHOTON INC0 citations42
US9837779B2Dec 5, 2017
Laser apparatus and laser apparatus manufacturing method
GIGAPHOTON INC0 citations41
US10143074B2Nov 27, 2018
Filter and target supply apparatus
GIGAPHOTON INC0 citations37
ENDO AKIRA
3 patentsUS8507883B2Aug 13, 2013
Extreme ultraviolet light source apparatus
ENDO AKIRA8 citations84
US8476609B2Jul 2, 2013
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and method for controlling saturable absorber used in extreme ultraviolet light source device
ENDO AKIRA4 citations62
US8093571B2Jan 10, 2012
Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device and method for controlling saturable absorber used in extreme ultraviolet light source device
ENDO AKIRA2 citations62