Inventor
ABE TAMOTSU
JP48 patents
⚠️ This page may combine multiple inventors who share the name “ABE TAMOTSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GIGAPHOTON INC
17 patentsUS7999241B2Aug 16, 2011
Extreme ultraviolet light source apparatus
GIGAPHOTON INC40 citations92
US7923705B2Apr 12, 2011
Extreme ultra violet light source apparatus
GIGAPHOTON INC25 citations92
US8003962B2Aug 23, 2011
Extreme ultraviolet light source apparatus and nozzle protection device
GIGAPHOTON INC13 citations84
US10172225B2Jan 1, 2019
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC5 citations73
US9986629B2May 29, 2018
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC5 citations73
US10764986B2Sep 1, 2020
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC2 citations72
US10314152B2Jun 4, 2019
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC2 citations72
US10102938B2Oct 16, 2018
Extreme ultraviolet light generating apparatus
GIGAPHOTON INC5 citations70
US8705035B2Apr 22, 2014
Target generation device
GIGAPHOTON INC3 citations63
US9510433B2Nov 29, 2016
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC2 citations62
US9872372B2Jan 16, 2018
Extreme ultraviolet light generation device
GIGAPHOTON INC0 citations52
US8804902B2Aug 12, 2014
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus
GIGAPHOTON INC0 citations52
US8698116B2Apr 15, 2014
Extreme ultra violet light source apparatus
GIGAPHOTON INC1 citations52
US9578730B2Feb 21, 2017
Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation system
GIGAPHOTON INC0 citations42
US9310686B2Apr 12, 2016
Target supply device and target supply method
GIGAPHOTON INC0 citations42
US10126657B2Nov 13, 2018
Extreme ultraviolet light generating apparatus
GIGAPHOTON INC0 citations41
US9942973B2Apr 10, 2018
Extreme ultraviolet light generation apparatus
GIGAPHOTON INC0 citations41
NAGAI SHINJI
5 patentsUS8242474B2Aug 14, 2012
Extreme ultraviolet light generation apparatus
NAGAI SHINJI6 citations84
US8872142B2Oct 28, 2014
Extreme ultraviolet light generation apparatus
NAGAI SHINJI9 citations83
US8624208B2Jan 7, 2014
Extreme ultraviolet light generation system
NAGAI SHINJI8 citations83
US8629417B2Jan 14, 2014
Extreme ultraviolet light generation apparatus
NAGAI SHINJI4 citations73
US8569723B2Oct 29, 2013
Extreme ultraviolet light source apparatus
NAGAI SHINJI4 citations62
KOMATSU MFG CO LTD
5 patentsUS8000361B2Aug 16, 2011
Laser system
KOMATSU MFG CO LTD10 citations84
US7880153B2Feb 1, 2011
Extreme ultra violet light source apparatus
KOMATSU MFG CO LTD14 citations84
US7842937B2Nov 30, 2010
Extreme ultra violet light source apparatus
KOMATSU MFG CO LTD4 citations63
US7732794B2Jun 8, 2010
Extreme ultra violet light source apparatus
KOMATSU MFG CO LTD6 citations63
US7683355B2Mar 23, 2010
Extreme ultra violet light source apparatus
KOMATSU MFG CO LTD4 citations63
MORIYA MASATO
4 patentsUS8536551B2Sep 17, 2013
Extreme ultra violet light source apparatus
MORIYA MASATO10 citations84
US8256441B2Sep 4, 2012
Method for cleaning optical element of EUV light source device and optical element cleaning device
MORIYA MASATO15 citations84
US8173984B2May 8, 2012
Extreme ultraviolet light source apparatus
MORIYA MASATO8 citations84
US8294129B2Oct 23, 2012
Extreme ultraviolet light source apparatus
MORIYA MASATO3 citations62