Inventor
KITAMURA AKINORI
JP31 patents
⚠️ This page may combine multiple inventors who share the name “KITAMURA AKINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
16 patentsUS9209034B2Dec 8, 2015
Plasma etching method and plasma etching apparatus
TOKYO ELECTRON LTD43 citations91
US9087798B2Jul 21, 2015
Etching method
TOKYO ELECTRON LTD41 citations91
US7473377B2Jan 6, 2009
Plasma processing method
TOKYO ELECTRON LTD14 citations80
US7794616B2Sep 14, 2010
Etching gas, etching method and etching gas evaluation method
TOKYO ELECTRON LTD5 citations63
US7842190B2Nov 30, 2010
Plasma etching method
TOKYO ELECTRON LTD5 citations62
US10121674B2Nov 6, 2018
Method for etching silicon layer and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US9779954B2Oct 3, 2017
Method for etching silicon layer and plasma processing apparatus
TOKYO ELECTRON LTD0 citations52
US9502537B2Nov 22, 2016
Method of selectively removing a region formed of silicon oxide and plasma processing apparatus
TOKYO ELECTRON LTD1 citations52
US7883631B2Feb 8, 2011
Plasma etching method, plasma etching apparatus, control program and computer-readable storage medium
TOKYO ELECTRON LTD0 citations52
US7655572B2Feb 2, 2010
Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, control program and computer storage medium
TOKYO ELECTRON LTD0 citations52
US9412607B2Aug 9, 2016
Plasma etching method
TOKYO ELECTRON LTD1 citations50
US7300881B2Nov 27, 2007
Plasma etching method
TOKYO ELECTRON LTD1 citations49
US9570312B2Feb 14, 2017
Plasma etching method
TOKYO ELECTRON LTD1 citations47
US6986851B2Jan 17, 2006
Dry developing method
TOKYO ELECTRON LTD0 citations47
US10672622B2Jun 2, 2020
Etching method and etching apparatus
TOKYO ELECTRON LTD0 citations42
US9711371B2Jul 18, 2017
Method of etching organic film
TOKYO ELECTRON LTD0 citations33
KITAMURA AKINORI
3 patentsUS8168739B2May 1, 2012
Polysiloxane, method for producing the same, and method for producing cured product of the same
KITAMURA AKINORI15 citations82
US4222206ASep 16, 1980
Earthquake resistant, even loaded man-made land structure and method of making same
KITAMURA AKINORI3 citations60
US8952117B2Feb 10, 2015
Process for producing solvent-soluble reactive polysiloxanes
KITAMURA AKINORI0 citations39
TOAGOSEI CO LTD
3 patentsUS9136486B2Sep 15, 2015
Composition for organic semiconductor insulating films, and organic semiconductor insulating film
TOAGOSEI CO LTD2 citations63
US7838626B2Nov 23, 2010
Polycarbosilane and method for producing same
TOAGOSEI CO LTD0 citations46
US9181399B2Nov 10, 2015
Method for producing polysiloxane
TOAGOSEI CO LTD0 citations33