Inventor
NOH YOUNGJIN
KR6 patents
⚠️ This page may combine multiple inventors who share the name “NOH YOUNGJIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS11367597B2Jun 21, 2022
Electrostatic chuck and plasma processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD4 citations71
US11348760B2May 31, 2022
Plasma processing apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD2 citations70
US11398397B2Jul 26, 2022
Electrostatic chuck and plasma processing apparatus including the same
SAMSUNG ELECTRONICS CO LTD0 citations60
US12322577B2Jun 3, 2025
Plasma baffle, substrate processing apparatus including the same, and substrate processing method using the same
SAMSUNG ELECTRONICS CO LTD0 citations57