Inventor
LERAY GARY
US16 patents
⚠️ This page may combine multiple inventors who share the name “LERAY GARY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
11 patentsUS8988848B2Mar 24, 2015
Extended and independent RF powered cathode substrate for extreme edge tunability
APPLIED MATERIALS INC47 citations97
US11177115B2Nov 16, 2021
Dual-level pulse tuning
APPLIED MATERIALS INC8 citations84
US9839109B1Dec 5, 2017
Dynamic control band for RF plasma current ratio control
APPLIED MATERIALS INC8 citations83
US9595423B2Mar 14, 2017
Frequency tuning for dual level radio frequency (RF) pulsing
APPLIED MATERIALS INC13 citations80
US9318304B2Apr 19, 2016
Frequency tuning for dual level radio frequency (RF) pulsing
APPLIED MATERIALS INC10 citations80
US10825708B2Nov 3, 2020
Process kit components for use with an extended and independent RF powered cathode substrate for extreme edge tunability
APPLIED MATERIALS INC2 citations73
US11749504B2Sep 5, 2023
Methods and apparatus for common excitation of frequency generators
APPLIED MATERIALS INC0 citations61
US10553400B2Feb 4, 2020
Methods and apparatus for frequency generator and match network communication
APPLIED MATERIALS INC0 citations51
US9190247B2Nov 17, 2015
Measurement of plural RF sensor devices in a pulsed RF plasma reactor
APPLIED MATERIALS INC1 citations51
US9406540B2Aug 2, 2016
Self-bias calculation on a substrate in a process chamber with bias power for single or multiple frequencies
APPLIED MATERIALS INC1 citations49
US10290469B2May 14, 2019
Enhanced plasma source for a plasma reactor
APPLIED MATERIALS INC0 citations36