Inventor
TODOROW VALENTIN NIKOLOV
US3 patents
Patents
3 patentsUS9595423B2Mar 14, 2017
Frequency tuning for dual level radio frequency (RF) pulsing
APPLIED MATERIALS INC13 citations80
US9318304B2Apr 19, 2016
Frequency tuning for dual level radio frequency (RF) pulsing
APPLIED MATERIALS INC10 citations80
US9406540B2Aug 2, 2016
Self-bias calculation on a substrate in a process chamber with bias power for single or multiple frequencies
APPLIED MATERIALS INC1 citations49