Inventor
PARK KYOUNGSIL
KR3 patents
Patents
3 patentsUS10503072B2Dec 10, 2019
Methods of fabricating semiconductor devices with flattened hardmask layers
SAMSUNG ELECTRONICS CO LTD0 citations46
US9829795B2Nov 28, 2017
Methods of fabricating semiconductor devices with flattened hardmask layers
SAMSUNG ELECTRONICS CO LTD0 citations46
US10431506B2Oct 1, 2019
Method of processing substrate and method of fabricating semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations40