Inventor
SHIN TAEHO
KR8 patents
⚠️ This page may combine multiple inventors who share the name “SHIN TAEHO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS6312616B1Nov 6, 2001
Plasma etching of polysilicon using fluorinated gas mixtures
APPLIED MATERIALS INC26 citations92
US7374636B2May 20, 2008
Method and apparatus for providing uniform plasma in a magnetic field enhanced plasma reactor
APPLIED MATERIALS INC21 citations91
US7838430B2Nov 23, 2010
Plasma control using dual cathode frequency mixing
APPLIED MATERIALS INC8 citations83
US7316199B2Jan 8, 2008
Method and apparatus for controlling the magnetic field intensity in a plasma enhanced semiconductor wafer processing chamber
APPLIED MATERIALS INC9 citations83
US6372151B1Apr 16, 2002
Storage poly process without carbon contamination
APPLIED MATERIALS INC11 citations73
US7736914B2Jun 15, 2010
Plasma control using dual cathode frequency mixing and controlling the level of polymer formation
APPLIED MATERIALS INC3 citations62