Inventor

LEE Leng Kheam

SG2 patents

Patents

2 patents

US10312124B2Jun 4, 2019

Single ultra-planar wafer table structure for both wafers and film frames

SEMICONDUCTOR TECH & INSTRUMENTS PTE LTD0 citations43

US10262885B2Apr 16, 2019

Multifunction wafer and film frame handling system

SEMICONDUCTOR TECH & INSTRUMENTS PTE LTD0 citations43