Inventor
Aquilino Michael
US12 patents
⚠️ This page may combine multiple inventors who share the name “Aquilino Michael”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
GLOBALFOUNDRIES INC
11 patentsUS10325819B1Jun 18, 2019
Methods, apparatus and system for providing a pre-RMG replacement metal contact for a finFET device
GLOBALFOUNDRIES INC15 citations84
US9905473B1Feb 27, 2018
Self-aligned contact etch for fabricating a FinFET
GLOBALFOUNDRIES INC7 citations83
US10269654B1Apr 23, 2019
Methods, apparatus and system for replacement contact for a finFET device
GLOBALFOUNDRIES INC12 citations82
US10644156B2May 5, 2020
Methods, apparatus, and system for reducing gate cut gouging and/or gate height loss in semiconductor devices
GLOBALFOUNDRIES INC5 citations72
US10418455B2Sep 17, 2019
Methods, apparatus and system for stringer defect reduction in a trench cut region of a finFET device
GLOBALFOUNDRIES INC2 citations72
US10340142B1Jul 2, 2019
Methods, apparatus and system for self-aligned metal hard masks
GLOBALFOUNDRIES INC3 citations72
US10204797B1Feb 12, 2019
Methods, apparatus, and system for reducing step height difference in semiconductor devices
GLOBALFOUNDRIES INC2 citations71
US10833160B1Nov 10, 2020
Field-effect transistors with self-aligned and non-self-aligned contact openings
GLOBALFOUNDRIES INC3 citations69
US10930549B2Feb 23, 2021
Cap structure
GLOBALFOUNDRIES INC0 citations61
US10522639B2Dec 31, 2019
Methods, apparatus and system for stringer defect reduction in a trench cut region of a finFET device
GLOBALFOUNDRIES INC0 citations51
US10460986B2Oct 29, 2019
Cap structure
GLOBALFOUNDRIES INC0 citations50