Inventor
KOPPELAARS NICOLAAS FRANCISCUS
NL5 patents
⚠️ This page may combine multiple inventors who share the name “KOPPELAARS NICOLAAS FRANCISCUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS6933513B2Aug 23, 2005
Gas flushing system for use in lithographic apparatus
ASML NETHERLANDS BV9 citations69
US7136142B2Nov 14, 2006
Lithographic apparatus having a gas flushing device
ASML NETHERLANDS BV2 citations57
US10649341B2May 12, 2020
Lithographic apparatus
ASML NETHERLANDS BV0 citations50
US9465302B2Oct 11, 2016
Lithographic apparatus
ASML NETHERLANDS BV0 citations50