Inventor
GROUWSTRA CÉDRIC DÉSIRÉ
NL16 patents
⚠️ This page may combine multiple inventors who share the name “GROUWSTRA CÉDRIC DÉSIRÉ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
14 patentsUS8760662B2Jun 24, 2014
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV16 citations92
US10877381B2Dec 29, 2020
Methods of determining corrections for a patterning process
ASML NETHERLANDS BV1 citations70
US11448973B2Sep 20, 2022
Computational metrology based correction and control
ASML NETHERLANDS BV2 citations68
US11525786B2Dec 13, 2022
Method and apparatus for angular-resolved spectroscopic lithography characterization
ASML NETHERLANDS BV0 citations62
US12078935B2Sep 3, 2024
Device manufacturing methods
ASML NETHERLANDS BV0 citations60
US11442366B2Sep 13, 2022
Device manufacturing methods
ASML NETHERLANDS BV0 citations60
US11782349B2Oct 10, 2023
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11592753B2Feb 28, 2023
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11327407B2May 10, 2022
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11520238B2Dec 6, 2022
Optimizing an apparatus for multi-stage processing of product units
ASML NETHERLANDS BV0 citations56
US11150562B2Oct 19, 2021
Optimizing an apparatus for multi-stage processing of product units
ASML NETHERLANDS BV0 citations56
US9964865B2May 8, 2018
Method of adjusting speed and/or routing of a table movement plan and a lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10649341B2May 12, 2020
Lithographic apparatus
ASML NETHERLANDS BV0 citations50
US9465302B2Oct 11, 2016
Lithographic apparatus
ASML NETHERLANDS BV0 citations50