Inventor
OKABE SHINYA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “OKABE SHINYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
6 patentsUS11626290B2Apr 11, 2023
Method, device, and system for etching silicon oxide film
TOKYO ELECTRON LTD1 citations62
US11069512B2Jul 20, 2021
Film forming apparatus and gas injection member used therefor
TOKYO ELECTRON LTD1 citations59
US9133548B2Sep 15, 2015
TiN film forming method and storage medium
TOKYO ELECTRON LTD0 citations51
US10731248B2Aug 4, 2020
Vacuum processing apparatus and operation method thereof
TOKYO ELECTRON LTD0 citations38
US10319585B2Jun 11, 2019
Film forming method
TOKYO ELECTRON LTD0 citations38
US10738374B2Aug 11, 2020
Method of performing a surface treatment on a mounting table, the mounting table and a plasma processing apparatus
TOKYO ELECTRON LTD0 citations36