Inventor
HIRAMATSU NAGAYASU
JP6 patents
Patents
6 patentsUS11629404B2Apr 18, 2023
Method of forming tungsten film and controller
TOKYO ELECTRON LTD0 citations60
US10910225B2Feb 2, 2021
Film forming method
TOKYO ELECTRON LTD0 citations60
US11069512B2Jul 20, 2021
Film forming apparatus and gas injection member used therefor
TOKYO ELECTRON LTD1 citations59
US11984319B2May 14, 2024
Substrate processing method and film forming system
TOKYO ELECTRON LTD0 citations50
US11753719B2Sep 12, 2023
Flow rate control method, flow rate control device, and film forming apparatus
TOKYO ELECTRON LTD0 citations46
US10319585B2Jun 11, 2019
Film forming method
TOKYO ELECTRON LTD0 citations38