Inventor
DEMPOH KAZUKI
JP4 patents
Patents
4 patentsUS12553128B2Feb 17, 2026
Particle suppression method
TOKYO ELECTRON LTD0 citations60
US11069512B2Jul 20, 2021
Film forming apparatus and gas injection member used therefor
TOKYO ELECTRON LTD1 citations59
US12027344B2Jul 2, 2024
Film forming apparatus
TOKYO ELECTRON LTD0 citations49
US11208724B2Dec 28, 2021
Film forming apparatus
TOKYO ELECTRON LTD0 citations43