Inventor
MIYATA SHOMA
JP3 patents
Patents
3 patentsUS12374544B2Jul 29, 2025
Processing method, method of manufacturing semiconductor device, processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP0 citations60
US11923191B2Mar 5, 2024
Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium
KOKUSAI ELECTRIC CORP1 citations60
US12424463B2Sep 23, 2025
Method of processing substrate, method of manufacturing semiconductor device, substrate processing system, and recording medium
KOKUSAI ELECTRIC CORP0 citations59