Inventor
AN SANGJIN
KR2 patents
Patents
2 patentsUS11289308B2Mar 29, 2022
Apparatus and method for processing substrate and method of manufacturing semiconductor device using the method
SAMSUNG ELECTRONICS CO LTD1 citations51
US11990348B2May 21, 2024
Wafer processing apparatus and wafer processing method using the same
SAMSUNG ELECTRONICS CO LTD0 citations43