Inventor
SHIMIZU TAKAYA
JP9 patents
⚠️ This page may combine multiple inventors who share the name “SHIMIZU TAKAYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS5963834AOct 5, 1999
Method for forming a CVD film
TOKYO ELECTRON LTD62 citations94
US6080444AJun 27, 2000
CVD film forming method including annealing and film forming performed at substantially the same pressure
TOKYO ELECTRON LTD11 citations72
US9349642B2May 24, 2016
Method of forming contact layer
TOKYO ELECTRON LTD1 citations51
US11348794B2May 31, 2022
Semiconductor film forming method using hydrazine-based compound gas
TOKYO ELECTRON LTD0 citations46
US9620370B2Apr 11, 2017
Method of forming Ti film
TOKYO ELECTRON LTD0 citations41