Inventor
BARNETT CODY
US4 patents
⚠️ This page may combine multiple inventors who share the name “BARNETT CODY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS9460915B2Oct 4, 2016
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges
LAM RES CORP3 citations71
USD1073758SMay 6, 2025
Baffle for substrate processing system
LAM RES CORP1 citations54
US9852901B2Dec 26, 2017
Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edges
LAM RES CORP0 citations51