Inventor
YOON KUIHYUN
KR7 patents
Patents
7 patentsUS10006872B2Jun 26, 2018
Optical inspection system
SAMSUNG ELECTRONICS CO LTD13 citations76
US11515193B2Nov 29, 2022
Etching apparatus
SAMSUNG ELECTRONICS CO LTD0 citations48
US10532896B2Jan 14, 2020
Grip apparatus and substrate inspection system including the same, and method of manufacturing semiconductor device using the substrate inspection system
SAMSUNG ELECTRONICS CO LTD0 citations47
US12494352B2Dec 9, 2025
Plasma confinement ring, semiconductor manufacturing apparatus including the same, and method of manufacturing a semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations45
US12222362B2Feb 11, 2025
Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing wafer
SAMSUNG ELECTRONICS CO LTD0 citations45
US12546393B2Feb 10, 2026
Substrate processing apparatus
SAMSUNG ELECTRONICS CO LTD0 citations43
US12183555B2Dec 31, 2024
Substrate processing apparatus and method of manufacturing semiconductor device using the same
SAMSUNG ELECTRONICS CO LTD0 citations43